The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2001
Filed:
Aug. 25, 1999
Hisaharu Seita, Kanagawa, JP;
Sony Corporation, Tokyo, JP;
Abstract
A vacuum processing chamber preventing corrosion of a magnetic seal means and removing the heavy metals, organic matter, etc. produced by the corrosion, including a vacuum processing chamber, a rotated member (for example, a susceptor and a wafer holder), a rotary shaft penetrating one side of the vacuum chamber and rotating the rotated member, and a cavity being defined between an inner wall of the magnetic seal means and the rotary shaft, said magnetic seal means maintaining the air-tightness in the vacuum processing chamber by using a magnetic fluid in the cavity; a gas inlet introducing a barrier gas (for example, an inert gas like N,, Ar, or He or an inert gas having a slight amount of O,added) to the cavity; and a gas outlet extracting a gas inside the cavity.