The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2001
Filed:
May. 25, 1999
Michael Liehr, Feldatal, DE;
Leybold Systems GmbH, Hanau, DE;
Abstract
For an arrangement for producing plasma in a vacuum chamber (,) with the aid of electromagnetic alternating fields, a rod-shaped conductor (,) is guided though a vacuum chamber (,) within a tube (,) of insulating material, with the inner diameter of the insulating tube (,) being greater than the diameter of the conductor (,) and at least one end of the insulating tube (,) being held in a wall (,) of the vacuum chamber (,) and the outer surface of the insulating tube being sealed with respect to the vacuum chamber, with at least one end of the conductor (,) being connected to a first source (,) for producing electromagnetic alternating fields and the region of the section of the rod-shaped conductor (,) which extends into the vacuum chamber (,) being in the form of a helix (,), with the winding length (L) of said section amounting to L=C/cos(&agr;) for a wavelength &lgr;,=10°<&agr;<15°.