The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2001
Filed:
Feb. 08, 1999
Applicant:
Inventors:
Yuang-Cheng Wang, Hsinchu, TW;
Chii-Ming Shiah, Hsinchu Hsien, TW;
Assignee:
United Integrated Circuits Corp., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 9/00 ;
U.S. Cl.
CPC ...
G03F 9/00 ;
Abstract
A mask includes a piece of reticle glass, a chromium thin film, a pre-alignment mark, a first alignment mark, a second alignment mark, a first identification barcode, and a second identification barcode. There is also a pellicle flame formed on the chromium thin film to prevent the patterning defects caused by particles. The mask of the invention is compatible with an ASML stepper and a Nikon stepper