The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2001
Filed:
Apr. 26, 1999
Applicant:
Inventors:
Yongli Huang, San Jose, CA (US);
Martin Lim, San Mateo, CA (US);
Tariq M. Haniff, Campbell, CA (US);
Weijie Yun, San Jose, CA (US);
Assignee:
SiTek, Inc., Sylmar, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 1/900 ;
U.S. Cl.
CPC ...
G01C 1/900 ;
Abstract
An angular rate sensor made from a structural wafer of single crystal silicon has a pair of proof masses lying in an X-Y plane and supported by a circular frame. The masses are driven into oscillation in the X-direction using an interdigitated comb drive. Rotation of the sensor about the Z-axis induces Coriolis forces which cause the frame to rotate, the rotation of the frame being indicative of the angular rate of the sensor. A parallel plate sensor located outside of the circular frame senses rotation of the frame.