The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2001
Filed:
Mar. 31, 1999
Masanao Murata, Ise, JP;
Hiroyuki Oyobe, Ise, JP;
Tsuyoshi Tanaka, Ise, JP;
Zenta Nanpei, Ise, JP;
Toshiyuki Takaoka, Ise, JP;
Hiroaki Saeki, Nirasaki, JP;
Keiichi Matsushima, Nirasaki, JP;
Other;
Abstract
A load port for semiconductor equipment includes a transporting apparatus,and/or a moving apparatus,for respectively transporting a carrier base,and moving a cover,, using a smaller force until the carrier base,and/or the cover,reaches a predetermined position that is at a predetermined distance from an opening,of the equipment. This position is at a distance where it is no longer possible to catch a hand or other object between the carrier base,or cover,and the semiconductor equipment. Then, the carrier base,and/or the cover,is transported or moved towards the opening,by the transporting apparatus,and/or moving apparatus,respectively transporting the carrier base,and/or moving the cover,towards the opening,to completely close the opening,using a larger force.