The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2001
Filed:
May. 14, 1999
Douglas S. Hobbs, Lexington, MA (US);
Bruce D. MacLeod, Pepperell, MA (US);
Adam F. Kelsey, West Newton, MA (US);
Optical Switch Corporation, Richardson, TX (US);
Abstract
A holographic lithography tool (,) for generating a light interference pattern used to expose a photosensitive medium (,) employs a refracting prism (,) in the optical path between divergent illuminating beams (,). The prism is optically coupled to the photosensitive medium via an index matching fluid (,). By increasing the incident beam angle and the index of refraction, the prism reduces the size of features recorded in the photosensitive material. The divergent illuminating beams are generated by a beam delivery system which preferably employs easily adjustable fiber optic cables (,). Use of the prism coupling technique facilitates use of fiber-optic-compatible wavelengths in the blue region of the spectrum in a variety of applications, such a distributed feedback grating fabrication.