The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2001
Filed:
Oct. 27, 1998
Rolf Adam, Hanau, DE;
Jörg Krempel-Hesse, Eckartsborn, DE;
Martin Bähr, Haundorf-Gräfensteinberg, DE;
Leybold Systems GmbH, Hanau, DE;
Abstract
A sputtering cathode with a flat plate-shaped target (,) and a tub-shaped yoke (,) arranged behind the target (,), with center ridge (,) and with magnets (,) for generating an enclosed tunnel of arc-shaped curved field lines (,) in front of the target surface, as well as with three sheet metal cutouts (,) or groups of partial cutouts inserted into the plane between the target (,) and the end faces (,) of the tub rim of the yoke (,) facing the target (,), all the sheet metal cutouts (,) together form two gaps (a,b) extending roughly parallel to the end faces (,), wherein the magnets (,) are each incorporated or inserted into the yoke bottom and the side surfaces of the magnets (,) facing towards and away from the target (,) run flush with the yoke bottom.