The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2001
Filed:
Dec. 03, 1998
Hirokazu Tanaka, Oyama, JP;
Toru Igarashi, Oyama, JP;
Komatsu Ltd., Tokyo, JP;
Abstract
A narrow-band oscillation excimer laser has optics which are excellent in durability and light quality, wherein an optical component is a fluoride component (,), and wherein a cleavage plane (,) of the fluoride component (,) is at least substantially parallel with at least one of (a) an incidence side plane (,), for a laser beam (,) entering the fluoride component(,), and (b) an exit side plane (,), for the laser beam (,) exiting from the fluoride component (,). The fluoride component (,) is positioned in the excimer laser so that the cleavage plane (,) of the fluoride component (,) is at least substantially perpendicular to a light path of the laser beam (,) passing through the inside of the fluoride component (,). A visible mark (,) indicates a direction of the cleavage plane (,).