The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2001

Filed:

Dec. 29, 1998
Applicant:
Inventors:

Michael D. Rostoker, Boulder Creek, CA (US);

Kumaraguru Muthukumaraswamy, Santa Clara, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/348 ;
U.S. Cl.
CPC ...
H01L 2/348 ;
Abstract

An integrated circuit (IC chip) has features such as conductive lines. The features have a thickness “T”, a width “W”, and a distance (spacing) “S” between adjacent features, and one or more of the following aspect ratio relationships: a ratio of width:thickness (W/T) is less than or equal to 0.7:1; a ratio of width:spacing (W:S) is less than or equal to 0.7:1; and a ratio of thickness:spacing (T:S) is less than or equal to 0.1:1. These relationships are particularly applicable to ICs having a feature geometry (width) of less than 0.16 microns and operating at less than 1.8 volts. An IC incorporating such features is suitably included in a system or subsystem having electrical functionality, such as general purpose computers, telecommunications devices, and the like.


Find Patent Forward Citations

Rostoker, Michael. (2001). Method of controlling critical dimension of features in integrated circuits (ics), ics formed by the method, and systems utilizing same (U.S. Patent No. 6181011). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6181011

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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