The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2001
Filed:
Oct. 19, 1998
Applicant:
Inventors:
Thomas M. Duddy, Foster City, CA (US);
Robin M. Ellis, San Bruno, CA (US);
Craig A. Bercaw, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/68 ; C23C 1/600 ;
U.S. Cl.
CPC ...
H05B 3/68 ; C23C 1/600 ;
Abstract
A heat exchanger apparatus including a heat exchange element and a substrate support. A clamp member is coupled to the heat exchange element and the substrate support by expanding the clamp member to an expanded state sufficient to surround a portion of the substrate support and the heat exchange element, and contracting the clamp member to couple the clamp member to the substrate support.
Duddy, Thomas. (2001). Heat exchanger apparatus for a semiconductor wafer support and method of fabricating same (U.S. Patent No. 6180926). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6180926
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile