The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2001

Filed:

Aug. 18, 1998
Applicant:
Inventors:

Tetsuya Yamamoto, Kanagawa, JP;

Yotaro Shiraishi, Kanagawa, JP;

Takao Maeda, Kanagawa, JP;

Assignee:

Fuji Electric Co., Ltd., Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/400 ;
U.S. Cl.
CPC ...
C23C 1/400 ;
Abstract

A deposition apparatus is used for depositing a layer of an organic thin-film light-emitting element on a substrate. The apparatus is formed of a vacuum chamber for depositing the layer for constituting the organic thin-film light-emitting element on the substrate, a set of parts disposed in the vacuum chamber for depositing the layer on the substrate and including a source for the layer, and a supporting member for supporting the set of parts so that the set of parts is replaceably disposed in the chamber. A dust of a material disposed in the source and evaporated therefrom is adhered to the set of parts, but the set of parts can be replaced easily. Thus, the apparatus can be operated efficiently.


Find Patent Forward Citations

Yamamoto, Tetsuya. (2001). Deposition apparatus for an organic thin-film light-emitting element (U.S. Patent No. 6179923). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6179923

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…