The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2001
Filed:
Jun. 10, 1999
Applicant:
Inventors:
Steffen Howitz, Dresden, DE;
Thomas Wegener, Neuruppin, DE;
Mario Burger, Pirna, DE;
Thomas Gehring, Ebersbach, DE;
Assignee:
Gesim Gesellschaft fur Silizium-Mikrosysteme mbH, Rosendorf, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 1/700 ;
U.S. Cl.
CPC ...
F04B 1/700 ;
Abstract
A microejector pump for generating microdrops includes at least one pump chamber configured in a silicon chip and a piezoelectrically actuable silicon membrane arranged over the pump chamber. The pump chamber is connected to at least one supply line as well as a discharge line provided with an ejection orifice. A glass chip closes off at least the pump chamber from the silicon membrane. The microejector pump can also include an integral heater and controller.