The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2001
Filed:
Jul. 28, 1998
Daniel L. Franca, Poughkeepsie, NY (US);
George F. Ouimet, Jr., Millbrook, NY (US);
Uldis A. Ziemins, Poughkeepsie, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method and apparatus for treating the surface of a substrate includes generating ozone in a generation chamber by using an optical source and transporting the ozone to a treatment chamber containing the substrate. The surface treatment utilizes an optical energy source and the generated ozone. The generation chamber and the treatment chamber are initially isolated from one another, which allows for the selective regulation of delivering ozone from the generation chamber to the treatment chamber. Preferably, a single optical source both generates ozone in the generation chamber and serves to clean and/or planarize the surface in the treatment chamber.