The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2001
Filed:
Oct. 29, 1997
Joung-Sun Lee, Suwon, KR;
Tae-hyup Kim, Kyunki-do, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A wafer holding stage used during a semiconductor device fabricating process decreases the number of particles that accumulate on a wafer. The wafer holding stage includes a stage having an upper surface for holding a wafer and a heating element disposed inside the stage for raising temperatures of the upper surface to a holding temperature above an ambient temperature. The heating element may be a heating wire for producing heat when supplied with a electric current or a heat exchange tube for carrying a heated fluid. The wafer holding stage may further comprise a low temperature particle collector, having a surface maintained at a collecting temperature below the ambient temperature, spaced apart a small distance from the stage.