The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2001
Filed:
Dec. 30, 1993
Applicant:
Inventor:
Monte A. Douglas, Coppell, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1302 ; H01L 2/1461 ;
U.S. Cl.
CPC ...
H01L 2/1302 ; H01L 2/1461 ;
Abstract
Generally, and in one form of the invention, a method is presented for the photo-stimulated etching of a CaF,surface,, comprising the steps of exposing the CaF,surface,to an ambient species,, exciting the CaF,surface,and/or the ambient species,by photo-stimulation sufficiently to allow reaction of the CaF,surface,with the ambient species,to form CaF,ambient species products, and removing the ambient species,and the CaF,ambient species products from the CaF,surface,. Other devices, systems and methods are also disclosed.