The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2001
Filed:
Nov. 12, 1996
Kiyoshi Takahashi, Tokyo, JP;
Kazuo Takahashi, Tokyo, JP;
Other;
Abstract
Pick-up tools and other devices for handling semiconductor wafers are require to be capable of withstanding corrosive chemical substances and extreme temperatures, and the valve unit for use in such devices must meet these requirements. The valve unit is also desired to be free from electrostatic charging. To this end, the valve unit comprises a valve main body, having a valve seat defined therein, which is made of relatively electroconductive and self-lubricating material such as PTFE, and a valve case which is injection molded around the valve unit and made of a material having some electroconductivity and a high resistance against deformation such as PEEK mixed with carbon fibers. Provision of annular grooves on the outer surface of the valve main body improves the attachment between the valve main body and the valve case so as to improve both the sealing performance and the mechanical integrity of the valve unit.