The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2001
Filed:
Mar. 02, 1999
Applicant:
Inventors:
Isik C. Kizilyalli, Orlando, FL (US);
Joseph Rudolph Radosevich, Orlando, FL (US);
Assignee:
Lucent Technologies, Inc., Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/144 ;
Abstract
A method of forming a multi-layered dual-doped polysilicon structure that minimizes Boron penetration into the n+ polysilicon during formation of the p+ polysilicon. The method of the present invention also reduces the migration of Boron (p+ gate dopant) from the p+ polysilicon and the migration of Arsenic and/or Phosphorous (n+ gate dopant) from the n+ polysilicon during subsequent fabrication processing steps. The present invention is also directed to a semiconductor device having a gate dopant barrier that minimizes gate dopant penetration and migration.