The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2001
Filed:
Jan. 30, 1998
Ronald T. Holm, Alexandria, VA (US);
The United States of America as represented by the Secretary of the Navy, Washington, DC (US);
Abstract
A new technique of optical bandgap thermometry allows one to accurately measure the temperature of semiconductor samples by using the temperature dependent reflective properties of the samples. The disclosed technique uses specular reflection at an oblique angle of incidence. Light from a light source such as quartz halogen lamp is chopped and focused by a lens. The light then is focused onto the sample at an oblique angle of incidence. The light is specularly reflected by the sample and is focused by a lens into a spectrometer. The spectrometer is used to determine the spectrum of the light reflected from the sample. The reflectance varies with temperature and the temperature of the sample is calculated as a function of the reflectance spectrum.