The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2001
Filed:
Sep. 22, 1998
Robert McAndrew, Austin, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A multi-speed slit valve apparatus and method of actuating a slit valve apparatus at least at two distinct speeds is provided. The slit valve apparatus includes a pneumatic cylinder,having a primary channel,and auxiliary channel,at each end, wherein the auxiliary channels,have a cross sectional area smaller than that of the primary channels,. A piston,defining a front volume,and a back volume,is disposed in the cylinder,and is reciprocally actuated by a compressed fluid such as air. At a predetermined stage during the cylinder's out-stroke and in-stroke the primary channels,become sealed from the front and back volumes,, respectively, such that during the remainder of the stroke the fluid is biased to exhaust through the auxiliary channels