The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2001
Filed:
Mar. 02, 1998
Takahiro Yamamoto, Kyoto-fu, JP;
Tadashi Morimoto, Kyoto-fu, JP;
Abstract
A mask is mounted on one surface of a ceramic green sheet which is supported on an X-Y table. The mask is provided with a plurality of through hole transmissive portions. A pulsed laser beam is applied to the mask. The size of the laser beam is sufficiently large to encompass at least several of said through hole transmissive portions. The laser beam passes through the through hole transmissive portions and simultaneously forms a plurality of through holes in the ceramic green sheet. Because the mask is located on (or at least substantially adjacent) the surface of the ceramic green sheet, the size and shape of the through holes will be approximately identical to the size and shape of the through hole transmissive portions, thereby precisely controlling the size and shape of the through holes. A preferred laser processing apparatus used in this processing method has a laser source, a laser-source driving circuit for driving the laser source, a table for holding an object having a mask disposed thereon, a galvanomirror directed to the table, a galvanomirror driving circuit for changing the reflection angle of the galvanomirror, a control circuit for sending control signals to the laser-source driving circuit and the galvanomirror driving circuit, and a converging lens disposed between the laser source and the mask so as to converge a laser beam emitted from the laser source.