The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 09, 2001

Filed:

Jul. 17, 1997
Applicant:
Inventor:

Masahide Tsukamoto, Nara, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/14763 ;
U.S. Cl.
CPC ...
H01L 2/14763 ;
Abstract

A method of forming a multilayered pattern in an electronic part wherein a pattern of multilayer wiring is formed via insulating layers in which a pattern for a succeeding layer is formed by adjusting to a position and a configuration of the pattern which was already formed by recognizing a position and configuration of the pattern.


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