The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2001
Filed:
Jan. 24, 2000
Matthew Peter Szapucki, Toms River, NJ (US);
Richard Kulkaski, Forked River, NJ (US);
Trevor J. Hadley, Brick, NJ (US);
Mark Anthony Santorelli, Barnegat, NJ (US);
M.E.C. Technology, Inc., Toms River, NJ (US);
Abstract
A showerhead electrode assembly for a plasma reactor for processing semiconductor wafers includes a gas plate having a plurality of through holes for passage of gas. The top face or side of the gas plate is of smaller diameter than the bottom side or face of the gas plate. An acutely angled peripheral groove is formed between the top face of the gas plate, and the lower portion thereof, with the groove terminating at a band-like ledge with the top face and lower portion. A locking ring is provided by two identical semicircular sections, each of which include in a lower portion of an inside sidewall, respectively, an acutely angled peripheral groove for mating with the groove of the gas plate. A unitary circular support collar is formed with a circular channel in a bottom portion thereof. These components are joined together by applying an adhesive in the channel of the support collar, mounting the locking ring sections onto the gas plate with the grooves therebetween interlocking, and thereafter forcing the channel of the support collar onto the locking ring sections until the bottom surfaces of the support collar abut against the ledge, and top face or side portion of the gas plate, respectively.