The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2001
Filed:
Dec. 14, 1999
Patrick J. Kelley, Orlando, FL (US);
Chung Wai Leung, Orlando, FL (US);
Ranbir Singh, Orlando, FL (US);
Lucent Technologies Inc., Murray Hill, NJ (US);
Abstract
A method of fabricating a novel split gate memory cell comprises forming a tunnel oxide layer on a silicon substrate, forming a first conductive layer over said tunnel oxide layer, etching a trench in said conductive layer to divide said conductive layer into two separate layers with a space therebetween, one such layer to become a first gate electrode and the other separate layer to become a floating gate electrode of the device, forming a dielectric layer over the exposed surfaces, and depositing a second conductive layer which will become a second control gate electrode over said dielectric layer.