The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2001
Filed:
Oct. 22, 1996
Applicant:
Inventors:
Assignee:
Balzers und Leybold Deutschland Holding AG, Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/434 ;
U.S. Cl.
CPC ...
C23C 1/434 ;
Abstract
Power supply lines (,) connect poles of an alternating current power source (,) to respective cathodes (,) in compartments (,), included among a plurality of adjacent compartments (,), which together form a vacuum chamber (,) and which are connected to each other by a passageway (,). The two compartments (,) with the cathodes (,) are separated from each other by intermediate compartments (,), at least some of which are equipped with additional sputter cathodes (,).