The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2001
Filed:
Mar. 10, 1998
Applicant:
Inventors:
Oleg Siniaguine, Santa Cruz, CA (US);
Steven Kaufman, Redwood City, CA (US);
Assignee:
TruSi Technologies LLC, Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/434 ; C23C 1/600 ;
U.S. Cl.
CPC ...
C23C 1/434 ; C23C 1/600 ;
Abstract
An article holder uses a gas flow, for example, a vortex, to hold the article in a desired position. The gas flow is substantially restricted to an article portion reserved for handling. The result of the processing is less sensitive to the condition (e.g. temperature) of that portion than to the condition of the rest of the article. Therefore, if the gas flow affects the condition (e.g., temperature) of the article portion contacting the gas flow, the processing result is improved.