The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2000
Filed:
Dec. 30, 1998
Applicant:
Inventor:
Timothy J Maloney, Palo Alto, CA (US);
Assignee:
Intel Corporaqtion, Santa Clara, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02F / ;
U.S. Cl.
CPC ...
359247 ; 359248 ; 359263 ;
Abstract
A through silicon optical modulator alters a phase of a light beam which enters the back of a silicon die. The modulator can be formed as a PMOS transistor fabricated in an n-well, or can be an NMOS transistor having a negative gate to substrate voltage. By modulating the well voltage (or gate potential) the phase of a portion of the reflected light is altered. Two accumulation layers are selectively formed in the light path which is reflected from the transistor gate electrode. The phase change is detected to provide a signal from the integrated circuit having the through silicon optical modulator structure.