The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2000
Filed:
Apr. 14, 1999
Toby J Winters, Austin, TX (US);
Moutasim O Khogly, Austin, TX (US);
Terrance P Melvin, Manchaca, TX (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
A downstream plasma reactor system is presented. The reactor system includes a reaction chamber. An inlet conduit is connected to the reaction chamber. A plasma tube is coupled to the inlet conduit. A sealing member is interposed between the plasma tube and the inlet conduit. A blocking member, preferably containing a fluorocarbon polymer, is also interposed between the plasma tube and the inlet conduit. The blocking member is positioned closer to the discharge opening of the plasma tube than the sealing member and is preferably capable of preventing a substantial quantity of plasma-generated reactive species from reaching the sealing member during operation of the reactor system.