The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2000
Filed:
Jun. 22, 1999
Yoshinobu Terui, Ayase, JP;
Hiroji Sato, Ayase, JP;
Speedfam Clean System Co., Ltd., Ayase, JP;
Abstract
A cleaning apparatus for cleaning disk-shaped workpieces while positively rotating them by a large driving force is equipped with a simple, efficient driving means, a cleaning mechanism 18 for cleaning workpieces W individually formed of an endless driving belt 19 for forcibly rotating a workpiece around an axis, and a pair of cleaning rollers 20 and 20 for clamping both surfaces of a rotating workpiece W from both sides to clean it, the driving belt 19 being curved in the circumferential direction of the workpiece W so as to be brought into linear contact with the outer periphery of the workpiece W.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile