The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2000
Filed:
Jan. 16, 1998
Applicant:
Inventors:
Thomas H Baum, New Fairfield, CT (US);
Peter S Kirlin, Bethel, CT (US);
Sofia Pombrik, Bethel, CT (US);
Assignee:
Advanced Technology Materials, Inc., Danbury, CT (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438580 ; 438686 ; 427252 ;
Abstract
A platinum source reagent liquid solution, comprising: (i) at least one platinum source compound selected from the group consisting of compounds of the formulae:
Baum, Thomas. (2000). Platinum source compositions for chemical vapor deposition of platinum (U.S. Patent No. 6162712). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6162712
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile