The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2000
Filed:
Jul. 12, 1999
Hiroshi Itoh, Fuchu, JP;
Masahiro Morisada, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A position control apparatus which controls a position of a stage. The apparatus includes an input device for inputting a reference locus for the stage, the reference locus including a group of scanning sections, each of which includes an acceleration section, a settling section associated with a provisional settling time, and a section for constant speed scanning, the stage settling to a constant speed in each settling section, a storage medium storing information regarding actual settling times, each of which corresponds to each scanning section, a correction device for correcting the reference locus on the basis of the information on the actual settling times, and a driving device for moving the stage in accordance with the reference locus corrected by the correction device.