The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2000
Filed:
Nov. 20, 1998
Applicant:
Inventor:
Eiichi Miyake, Amagasaki, JP;
Assignee:
Sanei Giken Co., Ltd., Hyogo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B / ; G03B / ; G03F / ; C09K / ;
U.S. Cl.
CPC ...
355 53 ; 355 67 ; 430-5 ; 430 20 ;
Abstract
According to an exposing apparatus and an exposing method of the present invention, a photomask is provided with linear patterns having their linear portions to be transferred onto a plate reduced in length. By moving and stopping photomask in one direction of plate and directing light to photomask, the linear patterns are transferred onto plate. Thus, the exposing apparatus and method are provided capable of efficiently transferring the linear patterns onto the plate by exposure using a small photomask.