The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2000
Filed:
Mar. 14, 1997
Fariborz Maseeh, Boston, MA (US);
IntelliSense Corp., Wilmington, MA (US);
Abstract
A knowledge based, computer-aided system and method is disclosed for simulating any set of linear or nonlinear simultaneous parametric dependencies. The preferred embodiment creates a model and provides an estimate of the material properties of materials comprising thin films disposed on semiconductor materials. However the system and method are suitable for creating a model and providing an estimate of the physical properties of materials undergoing other material fabrication processes that are dependent on several parameters. The method is suitable for implementation on exisitng general purpose computers. The method involves the general steps of entering parameter values for the material being subjected to the fabrication process, interrelating the user provided parameter values with a database of stored parameter values, calculating numerical solutions for the interrelated parameter and property values according to an Estimation Routine, and providing an output of numerical and graphical data relating to the desired physical properties. The system is capable of being implemented to include a dual hierarchical feedback and feed-foreward loop where a control system uses the Estimation Routine to determine what additional data acquisition is required. Such a feedback loop could also be employed in conjunction with this method to yield an optimized value for the material properties in question.