The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2000
Filed:
Sep. 24, 1999
Applicant:
Inventors:
Yun-Soo Kim, Daejeon, KR;
Won-Yong Koh, Daejeon, KR;
Su-Jin Ku, Daejeon, KR;
Chang-Gyoun Kim, Daejeon, KR;
Kyu-Sang Yu, Daejeon, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F / ; C07F / ; C30B / ;
U.S. Cl.
CPC ...
556 28 ; 556-7 ; 556 27 ; 556181 ; 556182 ; 117 88 ; 117104 ; 4272481 ; 427255 ;
Abstract
A novel organometallic compound of formula M[(.mu.-OR').sub.2 M'R.sub.2 ].sub.2 can be vaporized at a low temperature and advantageously employed in the CVD of a heterometallic oxide film of the MM'.sub.2 O.sub.4 type, wherein M is a divalent element such as Be, Mg, Zn or Cd; M' is a Group 13 element such as Al or Ga; and R and R' are each independently a C.sub.1-10 alkyl group, with the proviso that if M is Mg, M' is not Al.