The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2000
Filed:
Nov. 18, 1998
Applicant:
Inventors:
Chris Wooten, Austin, TX (US);
Edward E Ehrichs, Austin, TX (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01H / ;
U.S. Cl.
CPC ...
438 16 ; 438928 ; 324537 ;
Abstract
A semiconductor wafer analysis system and method. In various embodiments, methods and systems are described for inspection and review of semiconductor wafers. Wafer inverters are provided, and inspection data is gathered for both the front and back sides of the wafers. The wafer inverters are also available at wafer review stations so that both the front and back sides of the wafers can be reviewed with a microscope.