The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2000
Filed:
Dec. 01, 1999
Ray G Brooks, Bedford, TX (US);
Other;
Abstract
A method, apparatus and package for packaging contaminant-sensitive articles such as semiconductor wafers on shock absorbers in a sealed rigid plastic enclosure such as a box or the like which may be enclosed within another sealed enclosure wherein the sealed enclosures are each provided with a self-sealing member together with a hollow needle connected to a source of purging gas and a vacuum source for selectively piecing one or more of the self-sealing members to communicate the gas and vacuum sources with a selected one of the enclosures interiors for purging and/or evacuating the enclosures interiors to remove ion contaminants, moisture, oxygen, plastic particles, etc. whereby corrosive activity on the articles is eliminated and the sealed condition of both enclosures is maintained after the contaminants, etc. are removed and the needle is withdrawn thereby providing increased productive yields of such articles being processed between manufacturing steps by reducing or substantially eliminating environmental variations.