The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 28, 2000

Filed:

Oct. 22, 1997
Applicant:
Inventor:

Yasuyuki Takimoto, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D / ; H01L / ;
U.S. Cl.
CPC ...
438754 ; 4236585 ;
Abstract

A method for removing a thin film, which comprises applying a powder or solution of a salt to a thin film formed on a substrate, followed by heating to remove the thin film at the applied portion, wherein as the salt, a salt having some or all of hydrogen ions of an acid substituted by ammonium ions or alkali metal ions, is used.


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