The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2000
Filed:
Jul. 16, 1998
Hiromi Makimoto, Hyogo, JP;
Moriyoshi Nakashima, Hyogo, JP;
Kojiro Yuzuriha, Hyogo, JP;
Makoto Ooi, Hyogo, JP;
Jun Sumino, Hyogo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A field oxide film which is fine and having smaller upheaval of a bird's head is formed, so as to improve electrical characteristic of a conductive layer formed with end portions positioned on the field oxide film. A planarizing silicon film is formed on a silicon nitride film and a thermal oxide film, so as to planarize a concave generated between the thermal oxide film and a silicon nitride film. The planarizing silicon film is thermally oxidized, so as to form a planarizing thermal oxide film integrated with the thermal oxide film. Thereafter, the planarizing thermal oxide film is etched back to form the field oxide film, and the silicon nitride film and a polycrystalline silicon film are removed. Thereafter, the conductive layer with end portions positioned on the field oxide film is formed.