The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2000
Filed:
Mar. 24, 1998
Applicant:
Inventor:
Yasushi Kinoshita, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438384 ; 438422 ; 438756 ; 296101 ;
Abstract
An integrated circuit structure comprises a conductor film that serves as a passive element or an interconnection, and a silicon substrate. A cavity is disposed between the substrate and the conductor film and thus underneath the conductor film. The substrate is formed by forming an island of oxide film in a surface of the substrate, and then wet etching the island from the surface of the substrate thereby forming the cavity.