The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 21, 2000

Filed:

Apr. 04, 1996
Applicant:
Inventors:

Makoto Shibata, Kawasaki, JP;

Haruhiko Terai, Yokohama, JP;

Hirokazu Komuro, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
427571 ; 427574 ; 427579 ; 347 61 ; 347 62 ;
Abstract

A substrate for a liquid jet recording head is provided at least with a supporting member, an exothermic resistive element arranged on the supporting member for generating thermal energy to be utilized for discharging recording liquid, and pairs of wiring electrodes connected to the exothermic resistive element at given intervals. Such a substrate comprises a layer formed with a film produced by the application of a bias ECR plasma CVD method. With the layer thus formed, a desirable configuration of the wiring stepping portions as well as a desirable film quality can be obtained so as to make the surface of the substrate smooth thereby to implement a liquid jet recording head having an excellent durability at a low manufacturing cost when such a substrate is used for the fabrication of the liquid jet recording head.


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