Wafer disk pad having one or more wafer loading points to facilitate

Abstract

A wafer disk pad is presented having one or more wafer loading points to facilitate wafer loading and unloading using a vacuum wand. The wafer loading points comprise grooves in a base plate. Each groove begins at a frontside surface of the base plate, extends under a portion of an upper surface of the base plate reserved for wafer placement, and is dimensioned to receive a tip of a vacuum wand. In one embodiment, the base plate includes a pair of grooves. A first groove is located on a left side of the wafer disk pad, and is conveniently located and oriented for left-handed operators. A second groove is located on a right side of the wafer disk pad, and is conveniently located and oriented for right-handed operators facing the frontside surface. Each groove is preferably sloped to facilitate separation of the semiconductor wafer from the pad. The depth of each groove is greatest at the frontside surface and decreases with increasing lateral distance into the base plate from the frontside surface. A clamp member hingably attached to the base plate includes a resilient member for holding the semiconductor wafer against the base plate when the wafer disk pad is in a closed position. In one embodiment, the clamp member includes a clamp base, a pair of clamp arms, a pair of clamp fingers, and a pair of handles.