The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2000
Filed:
Jan. 25, 1999
Masashi Osanai, Hiratsuka, JP;
Shunsuke Miyamoto, Hiratsuka, JP;
Tomohisa Sato, Chigasaki, JP;
Hiroaki Takechi, Hadano, JP;
Tsutomu Hatanaka, Hiratsuka, JP;
Norio Takahashi, Hiratsuka, JP;
Toshiyuki Kamei, Hiratsuka, JP;
Takumi Sugihara, Hiratsuka, JP;
Isao Shibata, Hiratsuka, JP;
Hironori Akiba, Kawaguchi, JP;
Komatsu Ltd., Tokyo, JP;
Abstract
A temperature control system which performs control of an object whose temperature is to be controlled as accurately as possible. The system comprises: a chiller located in a fluid circulating and supplying system, for cooling a thermal fluid returning from a vacuum chamber, a first flow control valve located in the fluid circulating and supplying system in a position between the chiller and the vacuum chamber, a bypass passage for splitting and supplying thermal fluid returning from the vacuum chamber to a position between the first flow control valve and the vacuum chamber, before it reaches the chiller, a second flow control valve located in the bypass passage, and a halogen lamp heater located in the fluid circulating and supplying system in a position between a confluence point of the bypass passage and the vacuum chamber, for adjusting the temperature of the thermal fluid passing therethrough to a set temperature.