The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2000
Filed:
Jun. 10, 1998
Takeshi Kawazome, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
In a semiconductor process system having a semiconductor process apparatus for performing various jobs to manufacture a semiconductor device, a material convey unit for conveying materials used in the jobs to the semiconductor process apparatus, and a host computer for monitoring the operation state of the semiconductor process apparatus, instructing the material convey unit to convey a material used in a required job, and instructing the semiconductor process apparatus to execute the job, the host computer makes a job reservation that informs the semiconductor process apparatus of the job to be executed simultaneously with the convey instruction of the material used in the required job, and the semiconductor process apparatus confirms in accordance with the job reservation if job data required for the reserved job is present in the apparatus, and takes a predetermined measure such as requesting a job data transfer means to transfer job data required, or outputting a predetermined warning, if the job data is not present.