The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2000
Filed:
Jul. 09, 1996
Jinzo Watanabe, Miyagi-ken, JP;
Takeo Yamashita, Miyagi-ken, JP;
Masakazu Nakamura, Miyagi-ken, JP;
Shintaro Aoyama, Miyagi-ken, JP;
Hidetoshi Wakamatsu, Miyagi-ken, JP;
Tadashi Shibata, Miyagi-ken, JP;
Tadahiro Ohmi, Sendai-shi, Miyagi-ken 980, JP;
Nobuhiro Konishi, Miyagi-ken, JP;
Mizuho Morita, Miyagi-ken, JP;
Hisayuki Shimada, Miyagi-ken, JP;
Takashi Imaoka, Miyagi-ken, JP;
Other;
Takasago Netsugaku Kogyo Kabushiki Kaisha, Tokyo, JP;
Abstract
Vacuum processing equipment capable of preventing particles from sticking to objects to be processed in vacuum vessels. The vacuum equipment comprises a series of vacuum vessels separated by doors, and the pressure in the vessels are reducible respectively. The vessels are so configured that objects to be processed are movable among them, and there is provided light projection means for projecting ultra rays on gases introduced to at least of the vessels.