The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2000
Filed:
Apr. 24, 1998
Samsung Electronics Co., Ltd., Suwon, KR;
Korea Advanced Institute of Science and Technology, Taejon, KR;
Abstract
A microactuator is provided. The microactuator includes a substrate, a support fixed to an upper surface of the substrate, an elastic member connected to the support, an inertial member connected to the elastic member and spaced apart from the upper surface of the substrate by a predetermined distance, to be vibrated in a first direction parallel to the substrate, moving electrodes protruding from both sides of the inertial member in a second direction perpendicular to the first direction, fixed electrodes fixed on the substrate, facing the moving electrodes, spaced apart from the moving electrodes by a predetermined distance, and supplying an electrostatic repulsive force in the first direction to the moving electrodes when an electric potential is applied, common electrodes fixed on the substrate in the first direction, spaced apart from the moving electrodes and the fixed electrodes by a predetermined distance, and a power supply applying an electric potential to the moving electrodes, the fixed electrodes and the common electrodes.