The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2000
Filed:
Jan. 19, 1999
Tetsuya Tomofuji, Kawasaki, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An optical membrane forming apparatus comprises a vacuum chamber (7), a lens holder (2) placed in the chamber (7) for holding one or more lenses (3) in such a manner that each lens (3) is rotational about its axis, and that the lens holder (2) itself is rotational about its own axis, and a plurality of vaporization sources (10a-10c) placed in the chamber (7). Each of the vaporization sources (10a-10c) produces vaporized particles for forming a layer of the membrane on the surface of the lens (3). The vaporization rate of the plurality of vaporization sources are independently controlled. A diaphragm plate (4) is placed between the vaporization sources (10a-10c) and the lenses (3) in order to control the direction of diffusion of the vaporized particles. Each of the sources (10a-10c) has a sample container which is partitioned into a plurality of rooms to store different samples.