The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2000
Filed:
Jan. 05, 1998
Applicant:
Inventors:
Yuji Matsuura, Sendai 980-77, JP;
Mitsunobu Miyagi, Sendai 980-77, JP;
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
385125 ;
Abstract
A hollow waveguide that transmits ultraviolet light with low attenuation. The present invention comprises a small-diameter, thin-wall, glass tube and a thin aluminum film on the inner surface of the glass tube. The aluminum film is deposited by a chemical vapor deposition method using an organometallic of aluminum as a precursor. The deposition process produces high smoothness of the film surface.