The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2000
Filed:
Dec. 02, 1999
Robert A Boie, Westfield, NJ (US);
Lucent Technologies Inc., Murray Hill, NJ (US);
Abstract
An electrostatic actuator and a method for actuating a micro-machine structure. The micro-machine structure has a stationary part and a movable part that is relatively movable between a rest position and an activated position and is resiliently connected to the stationary part. The stationary part and the movable part form a flexible sub-structure having a resonant frequency. The actuator comprises a first electrode disposed on the stationary part and a second electrode disposed on the movable part. The actuator also includes a wave generator, connected to the first electrode and the second electrode, for generating an alternating voltage signal to the first electrode and a reference voltage signal to the second electrode so as to impart an electrostatic force between the stationary and movable parts and to move the movable part from the rest position to the activated position. The electrostatic force for fixed amplitude wave has a constant force component and a vibratory force component. The alternating voltage signal has a frequency sufficiently higher than the resonant frequency of the sub-structure so that the vibratory force component is absorbed by the sub-structure and the activated position remains substantially constant. The actuator motion or position is controlled by varying the amplitude of the alternating voltage signal.