The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2000
Filed:
Dec. 11, 1997
Applicant:
Inventors:
Robert M Wallace, Richardson, TX (US);
Peijun Chen, Dallas, TX (US);
S Charles Baber, Richardson, TX (US);
Steven A Henck, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438700 ; 438709 ; 438710 ; 438720 ; 438745 ; 438754 ;
Abstract
An integrated circuit fabrication process in which residual fluorine contamination on metal surfaces after ashing is removed by exposure to an NH.sub.3 /O.sub.2 plasma.
Wallace, Robert. (2000). Low temperature process for post-etch defluoridation of metals (U.S. Patent No. 6140243). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6140243
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile