The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2000
Filed:
Jul. 20, 1998
Applicant:
Inventor:
Hirohito Watanabe, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438398 ; 438238 ; 438239 ; 438255 ; 438444 ; 438488 ;
Abstract
Ingredient gas is first supplied into a reacting section disposed in an apparatus for chemical vapor deposition. Subsequently, a silicon film is deposited on a wafer under a condition that temperature at the upstream side of a direction of the ingredient gas flow inside the reacting section is higher than that at the downstream side thereof.