The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2000
Filed:
Jul. 28, 1999
Applicant:
Inventor:
Edwin Waldbusser, Virginia Beach, VA (US);
Assignee:
Controls Corporation of America, Virginia Beach, VA (US);
Primary Examiner:
Int. Cl.
CPC ...
G05D / ;
U.S. Cl.
CPC ...
137341 ; 137486 ; 1374875 ;
Abstract
The present invention is directed to a mass flow controller having an automatic pressure compensator in the form of a dome loaded pressure regulator, wherein the dome loaded pressure regulator is, in turn, controlled by a dome-loading gas line regulated by a pilot pressure regulator. The pilot pressure regulator and the mass flow controller are advantageously controlled by a single microprocessor, and may advantageously all be mounted to a single manifold block.